MEMS based Design and Analysis of a Biosensor for Detection of Hepatitis Virus

被引：0

作者：

Moudgil, Akshay ^{[1
]}

Singh, K. K. ^{[2
]}

Swaminathan, Sundaram ^{[1
]}

机构：

[1] BITS Pilani, Dept Elect & Elect Engn, Dubai Campus, Dubai, U Arab Emirates

[2] BITS Pilani, Dept Phys, Dubai, U Arab Emirates

来源：

2015 IEEE 15TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2015年

关键词：

MEMS/NEMS; Cantilever; nano-biosensor; Piezoelectric; Hepatitis; SENSOR;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we design a novel piezoelectric MEMS biosensor for the detection of hepatitis virus. A PZT-5A piezoelectric based poly-silicon cantilever of length 500 mu m x 100 mu m x 7 mu m is used in the model which is actuated by electromagnetic induction for sensing changes in mechanical vibrations caused by adsorption of virus of the order of pg of sample mass at the tip of cantilever, producing an output signal at different resonant frequencies. A COMSOL model for the MEMS based piezoelectric biosensor generate 1.051x10(-4) V and shows high sensitivity to changes in attached mass at the tip. The results strongly indicate the reliability of designed biosensor for detection of Hepatitis viruses.

引用

页码：805 / 808

页数：4

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