Ultrahigh-Q on-chip silicon-germanium microresonators

被引：7

作者：

Schilling, Ryan ^{[1
]}

Xiong, Chi ^{[1
]}

Kamlapurkar, Swetha ^{[1
]}

Falk, Abram ^{[1
]}

Marchack, Nathan ^{[1
]}

Bedell, Stephen ^{[1
]}

Haight, Richard ^{[1
]}

Scerbo, Christopher ^{[1
]}

Paik, Hanhee ^{[1
]}

Orcutt, Jason S. ^{[1
]}

机构：

[1] IBM Quantum, TJ Watson Res Ctr, 1101 Kitchawan Rd, Yorktown Hts, NY 10598 USA

来源：

OPTICA | 2022年 / 9卷 / 03期

关键词：

WAVE-GUIDES; SIGE;

D O I：

10.1364/OPTICA.448469

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To date, integrated waveguides with the lowest losses have all relied at least in part on amorphous materials. In this work, we demonstrate fully crystalline, single-mode integrated microresonators comprising epitaxially grown Si0.86Ge0.14 waveguide cores with silicon claddings. This platform supports ultrahigh-quality-factor resonances, with Q reaching 1.71 +/- 0.06 x 10(8), corresponding to a loss rate of 0.39 +/- 0.02 dB/m. This Q is nearly an order-of-magnitude improvement over that seen in prior integrated Si waveguides. Together with silicon's strong Kerr nonlinearity, our results could unlock important new avenues for microwave pho- tonics, optomechanics, and quantum transduction. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

引用

页码：284 / 287

页数：4

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