GaN substrate and GaN homo-epitaxy for LEDs: Progress and challenges

被引:8
作者
Wu Jie-Jun [1 ]
Wang Kun [1 ]
Yu Tong-Jun [1 ]
Zhang Guo-Yi [1 ]
机构
[1] Peking Univ, Sch Phys, State Key Lab Artificial Microstruct & Mesoscop P, Beijing 100871, Peoples R China
基金
国家高技术研究发展计划(863计划); 中国国家自然科学基金;
关键词
gallium nitride (GaN); free standing substrate; hydride vapor phase epitaxy (HVPE); homo-epitaxy; VAPOR-PHASE EPITAXY; HIGH-PRESSURE CRYSTALLIZATION; LIGHT-EMITTING-DIODES; HIGHLY UNIFORM GROWTH; NA FLUX METHOD; SINGLE-CRYSTALS; GALLIUM NITRIDE; SELF-SEPARATION; OVERGROWTH; BLUE;
D O I
10.1088/1674-1056/24/6/068106
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
After a brief review on the progresses in GaN substrates by ammonothermal method and Na-flux method and hydride vapor phase epitaxy (HVPE) technology, our research results of growing GaN thick layer by a gas flow-modulated HVPE, removing the GaN layer through an efficient self-separation process from sapphire substrate, and modifying the uniformity of multiple wafer growth are presented. The effects of surface morphology and defect behaviors on the GaN homo-epitaxial growth on free standing substrate are also discussed, and followed by the advances of LEDs on GaN substrates and prospects of their applications in solid state lighting.
引用
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页数:10
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