Stability of Metal Oxide Semiconductor Gas Sensors: A Review

被引:101
|
作者
Chai, Hongfeng [1 ]
Zheng, Zichen [1 ]
Liu, Kewei [1 ]
Xu, Jinyong [1 ]
Wu, Kaidi [1 ]
Luo, Yifan [1 ]
Liao, Hanlin [2 ]
Debliquy, Marc [3 ]
Zhang, Chao [1 ]
机构
[1] Yangzhou Univ, Coll Mech Engn, Yangzhou 225127, Jiangsu, Peoples R China
[2] Univ Bourgogne Franche Comte, Univ Technol Belft Montbeliard UTBM, CNRS, ICB UMR 6303, F-90010 Belfort, France
[3] Univ Mons, Fac Polytech, Serv Sci Mat, B-7000 Mons, Belgium
关键词
Sensors; Thermal stability; Metals; Stability criteria; Temperature sensors; Gas detectors; Adsorption; Semiconductor; metal oxide; gas sensor; stability; SOLUTION PRECURSOR; THERMAL-STABILITY; PLASMA SPRAY; TIN DIOXIDE; TEMPERATURE; PERFORMANCE; HYDROGEN; ZNO; MECHANISMS; HUMIDITY;
D O I
10.1109/JSEN.2022.3148264
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Sensor stability is defined as the ability to maintain a relatively stable and repeatable signal over a sufficient period. Long-term stability for gas sensors is an essential capability for carrying out long-term data collection of human exhaled breath, environmental monitoring and other gas detection in the modern electronic information age. This article reviews the research advances on the stability of metal oxide semiconductor gas sensors in the past five years. The impact of structure, environment, toxicity and sensor array on the sensor stability are discussed. Then, the improvement schemes of existing materials and structure design are summarized. The achievements of structure doping, humidity, anti-poisoning and photoactivation are overviewed. Finally, the great significance of elucidating the sensing mechanism and carrying out the life acceleration test for future research and development is pointed out.
引用
收藏
页码:5470 / 5481
页数:12
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