A XRD study of Co/Au multilayers using a laboratory microdiffractometer

被引：10

作者：

Bontempi, E

Depero, LE

机构：

[1] Univ Brescia, INSTM, I-25123 Brescia, Italy

[2] Univ Brescia, Dipartimento Ingn Meccan, Lab Strutturist Chim, I-25123 Brescia, Italy

来源：

THIN SOLID FILMS | 2004年 / 450卷 / 01期

关键词：

multilayer; XRD; XRD2;

D O I：

10.1016/j.tsf.2003.10.068

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we show that by the analysis of 2D images collected with a laboratory X-ray microdiffractometer it is possible to non-destructively evaluate the structure, the microstructure, and the preferred orientation of films. In particular, the structural analysis of Co/Au multilayers on Si(100) deposited at different Ar pressures are reported and discussed. (C) 2003 Elsevier B.V. All rights reserved.

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页码：183 / 186

页数：4

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