Deposition, microstructure and properties of texture-controlled CVD α-Al2O3 coatings

被引:189
作者
Ruppi, S [1 ]
机构
[1] Seco Tools AB, S-73782 Fagersta, Sweden
关键词
chemical vapour deposition; Al2O3; nucleation; texture; wear resistance;
D O I
10.1016/j.ijrmhm.2005.05.004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The influence of nucleation on the microstructure and properties of CVD Al2O3 was investigated. The experimental alpha-Al2O3 layers were deposited (a) without nucleation control and (b) with nucleation steps resulting in pronounced < 10 (1) over bar2 > , < 10 (1) over bar4 > and < 10 (1) over bar0 > growth textures. The experimental layers were characterised using X-ray diffraction, scanning electron microscopy and transmission electron microscopy. Wear properties of the textured coatings were evaluated in turning. The chemistry of the nucleation surface appeared to be an important factor in pre-determining the phase content and growth textures of the Al2O3 layers. Optimised nucleation resulted in substantially improved wear properties and these kinds of alpha-Al2O3 layers were typically composed of relatively small, defect-free grains exhibiting no porosity. The < 10 (1) over bar4 > textured alpha-Al2O3 layer showed the best wear resistance. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:306 / 316
页数:11
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