Adiabatic embedment of nanomechanical resonators in photonic microring cavities

被引：3

作者：

Xiong, Chi ^{[1
]}

Pernice, Wolfram ^{[1
]}

Li, Mo ^{[1
]}

Rooks, Michael ^{[2
]}

Tang, Hong X. ^{[1
]}

机构：

[1] Yale Univ, Dept Elect Engn, New Haven, CT 06520 USA

[2] Yale Inst Nanosci & Quantum Engn, New Haven, CT 06520 USA

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 26期

基金：

美国国家科学基金会;

关键词：

micro-optomechanical devices; nanoelectromechanical devices; nanophotonics; optical resonators; Q-factor; WAVE-GUIDES; FILTERS;

D O I：

10.1063/1.3458692

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of mechanical beam. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3458692]

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页数：3

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