Analytical 3D-Analysis of compressional wave excitation by thickness-shear-mode resonators

被引:0
|
作者
Beigelbeck, R [1 ]
Jakoby, B [1 ]
机构
[1] Austrian Acad Sci, Res Unit Integrated Sensor Syst, A-1010 Vienna, Austria
来源
PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年
关键词
TSM resonator; viscosity sensor; compressional wave excitation; Navier-Stokes equation;
D O I
10.1109/ICSENS.2004.1426107
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Piezoelectric thickness-shear-mode resonators are well established as viscosity and chemical liquid sensors. When immersed in the sample liquid, the resonator excites a strongly damped shear-polarized wave as well as spurious compressional waves in the liquid. The latter are scarcely damped, which can lead to disturbing interferences if they are reflected by obstacles close to the sensor. In order to analyze the spurious compressional wave excitation, we developed a three-dimensional mathematical model utilizing solutions of the linearized Navier-Stokes equation in the spatial Fourier-domain, which govern the acoustic field in the liquid. Finally, we discuss the solutions and illustrate the results by considering practical examples.
引用
收藏
页码:91 / 94
页数:4
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