UV-laser ablation spectroscopy in element analysis of solid surface

被引：11

作者：

Oki, Y ^{[1
]}

Takao, T ^{[1
]}

Nomura, T ^{[1
]}

Maeda, M ^{[1
]}

机构：

[1] Kyushu Univ, Dept Elect Device Engn, Grad Sch Informat Sci & Elect Engn, Fukuoka 8128581, Japan

来源：

OPTICAL REVIEW | 1998年 / 5卷 / 04期

关键词：

laser ablation; surface analysis; laser spectroscopy; excimer laser; emission spectroscopy; subnanometer structure;

D O I：

10.1007/s10043-998-0242-2

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Laser ablation for the atomic emission spectroscopy of a glass sample is studied using pulsed UV laser systems and the effect of the laser wavelength is investigated. The threshold fluence for ablation is decreased and the detection sensitivity is improved for shorter wavelengths. Furthermore, very thin (less than 1 nm/shot) surface slicing is possible at a wavelength as short as 193 nm. Polymers also show good ablation characteristics. Improvement of sensitivity and spatial resolution by using shorter wavelength laser ablation is discussed for Na detection in a glass sample.

引用

页码：242 / 246

页数：5

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