Thermal Modeling of a Chiplet-Based Packaging With a 2.5-D Through-Silicon Via Interposer

被引:14
作者
Zhou, Minghao [1 ,2 ]
Li, Li [1 ]
Hou, Fengze [3 ]
He, Guoqiang [1 ]
Fan, Jiaqi [2 ]
机构
[1] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210093, Peoples R China
[2] Natl Ctr Adv Packaging, Wuxi 214135, Jiangsu, Peoples R China
[3] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
来源
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY | 2022年 / 12卷 / 06期
基金
中国国家自然科学基金;
关键词
2,5-D interposer; thermal design power (TDP); bonding approach; chiplet; thermal modeling;
D O I
10.1109/TCPMT.2022.3174608
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Chiplet-based packaging technology integrates multiple heterogeneous dies with different functions and materials into a single system as a LEGO-based approach using advanced packaging technology. However, it also brings new challenges in the thermal design aspect and thermal crosstalk between chiplets. In this article, the thermal modeling of a chiplet-based packaging with a 2.5-D interposer was carried out. Two chiplets were mounted on the interposer side-by-side. A Cu lid was attached to the top surfaces of the chiplets and periphery of the interposer through the thermal interface material1 (TIM1) and adhesive, respectively. To further dissipate the heat from the top side, a heat sink was attached to the top surface of the lid through a layer of TIM2. The effects of the TIM type, bonding approach between chiplets and interposer, heat sink structure, thermal crosstalk, convective heat transfer coefficient above the lid, and thermal design power (TDP) were analyzed. The study results show that the bumpless interconnect is beneficial for the heat dissipation of the chiplet-based packaging. The staggered column fin can exhibit superior cooling performance. The short pitch would bring cooling challenges for fine-pitch multiple chiplets integration. The temperature is decreased rapidly first and then slowed down with the increase of convective heat transfer coefficient above the lid. Under 10 000 W/m(2).K, the maximum TDP was about 250 W.
引用
收藏
页码:956 / 963
页数:8
相关论文
共 34 条
  • [1] Thermal Compression Bonding of 30μm Pitch Cu Pillar Microbump on Organic Substrate with Bare Cu Bondpad
    Au, K. Y.
    Che, F. X.
    Lin, Jong-Kai
    Hsiao, Hsiang-Yao
    Zhang, Xiaowu
    Lim, Sharon
    Aw, Jie Li
    Chow, Alvin
    [J]. 2016 IEEE 66TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2016, : 936 - 942
  • [2] Banijamali B, 2011, ELEC COMP C, P285, DOI 10.1109/ECTC.2011.5898527
  • [3] Beica R., 2013, P EURP MICR PACK C E, P1
  • [4] Thermomechanical finite element modeling of Cu-SiO2 direct hybrid bonding with a dishing effect on Cu surfaces
    Beilliard, Y.
    Estevez, R.
    Parry, G.
    McGarry, P.
    Di Cioccio, L.
    Coudrain, P.
    [J]. INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2017, 117 : 208 - 220
  • [5] Chaware R, 2012, 2012 IEEE 62ND ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), P279, DOI 10.1109/ECTC.2012.6248841
  • [6] System on Integrated Chips (SoICTM) for 3D Heterogeneous Integration
    Chen, F. C.
    Chen, M. F.
    Chiou, W. C.
    Yu, Doug C. H.
    [J]. 2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 594 - 599
  • [7] Die Embedding Challenges for EMIB Advanced Packaging Technology
    Duan, Gang
    Kanaoka, Yosuke
    McRee, Robin
    Nie, Bai
    Manepalli, Rahul
    [J]. IEEE 71ST ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2021), 2021, : 1 - 7
  • [8] Enquist P., 2009, 2009 IEEE INT C 3D S, P1, DOI [10.1109/3DIC.2009.5306533, DOI 10.1109/3DIC.2009.5306533]
  • [9] Die to Wafer Stacking with Low Temperature Hybrid Bonding
    Gao, Guilian
    Workman, Thomas
    Uzoh, Cyprian
    Bang, K. M.
    Mirkarimi, Laura
    Theil, Jeremy
    Suwito, Dominik
    Katkar, Rajesh
    Fountain, Gill
    Guevara, Gabe
    Lee, Bongsub
    [J]. 2020 IEEE 70TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2020), 2020, : 589 - 594
  • [10] Low Temperature Cu Interconnect with Chip to Wafer Hybrid Bonding
    Gao, Guilian
    Mirkarimi, Laura
    Workman, Thomas
    Fountain, Gill
    Theil, Jeremy
    Guevara, Gabe
    Liu, Ping
    Lee, Bongsub
    Mrozek, Pawel
    Huynh, Michael
    Rudolph, Catharina
    Werner, Thomas
    Hanisch, Anke
    [J]. 2019 IEEE 69TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2019, : 628 - 635