Z-pinch discharge based EUV radiation source driven by a low inductance gap-less circuit

被引：0

作者：

Katsuki, S ^{[1
]}

Kimura, A ^{[1
]}

Akiyoshi, S ^{[1
]}

Fukumoto, H ^{[1
]}

Horita, H ^{[1
]}

Namihira, T ^{[1
]}

Akiyama, H ^{[1
]}

机构：

[1] Kumamoto Univ, Dept Elect & Comp Engn, Kumamoto 8608555, Japan

来源：

Proceedings of the 26th International Power Modulator Symposium and 2004 High Voltage Workshop, Conference Record | 2004年

关键词：

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

This paper describes the characteristics of the EUV light source based on z-pinch discharges, which is driven by a low inductance pulsed current generator. The driving circuit with an inductance of 30 nH is capable of delivering the current of 34 kA in 110 ns to the z-pinch load. The z-pinch xenon plasmas are produced in the ceramic tube with the dimension of 3 or 5 nun in diameter and 5 mm in length. According to plasma dynamics observed by a fast framing camera, there are two radiation modes, one is dynamic and the other is quasi-static. Plasma behaves more dynamically with larger diameter discharge tube. The EUV emission from the z-pinch plasma was characterized with respect to spectrum and in-band EUV energy (13.5 nm, 2% bandwidth) as well as temporal behavior of the emission. Presently the maximum in-band EUV energy is 11 mJ/sr in the direction of 15 degree off-axis.

引用

页码：322 / 325

页数：4

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