Fluid Temperature Measurement in Aqueous Solution via Electrochemical Impedance

被引:5
作者
Baldwin, Alex [1 ]
Yoon, Eugene [2 ]
Hudson, Trevor [2 ]
Meng, Ellis [2 ,3 ]
机构
[1] Niche Biomed Inc, Los Angeles, CA 90024 USA
[2] Univ Southern Calif, Dept Biomed Engn, Los Angeles, CA 90089 USA
[3] UnivSouthern Calif, Ming Hsieh Dept Elect & Comp Engn, Los Angeles, CA 90089 USA
基金
美国国家科学基金会;
关键词
Temperature measurement; electrochemical impedance; biomedical sensor; thin film sensor; flexible sensor; DOUBLE-LAYER CAPACITANCE; FLOW SENSOR; CEREBROSPINAL-FLUID; BRAIN TEMPERATURE; CONDUCTIVITY; PLATINUM; KINETICS;
D O I
10.1109/JMEMS.2019.2939811
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel temperature transduction method using the high-frequency electrochemical impedance between a pair of microelectrodes exposed to aqueous solution is reported. The solution resistance of an aqueous ionic solution is highly temperature dependent, and the electrochemical impedance between two microelectrodes is dominated by solution resistance when measured at the appropriate frequency. Therefore, precise measurements of electrochemical impedance at the proper frequency in a two-electrode system can be used to transduce solution temperature. To demonstrate this method, a temperature sensor composed of two thin-film platinum electrodes on a freestanding Parylene C substrate was designed and fabricated. A platinum resistance temperature detector was co-fabricated to provide a simple means of benchmarking against an existing standard. Transduction via electrochemical impedance was achieved by measuring the real part of impedance at the frequency where phase was minimized. Fluid temperature was transduced between 15C and 50C with high sensitivity (-1.21/C) and resolution (0.02C). A $4\times $ improvement in sensitivity and resolution over the conventional platinum resistance temperature detector was achieved. The sensor design described here features flexible construction with inert materials which facilitates future use in biomedical or microfluidic applications. [2019-0190]
引用
收藏
页码:1060 / 1067
页数:8
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