Integrating fault tolerance algorithm and circularly polarized ellipsometer for point-of-care applications

被引:36
作者
Jan, Chia-Ming [1 ]
Lee, Yu-Hsun [1 ]
Wu, Kuang-Chong [1 ,2 ]
Lee, Chih-Kung [1 ,3 ]
机构
[1] Natl Taiwan Univ, Inst Appl Mech, Taipei, Taiwan
[2] NARL, Taipei, Taiwan
[3] III, Taipei, Taiwan
来源
OPTICS EXPRESS | 2011年 / 19卷 / 06期
关键词
SURFACE-PLASMON RESONANCE; PHASE-SHIFTING INTERFEROMETRY; SITU SPECTRAL ELLIPSOMETRY; IMAGING ELLIPSOMETER; CALIBRATION; RESOLUTION; THICKNESS;
D O I
10.1364/OE.19.005431
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A circularly polarized ellipsometer was developed to enable real-time measurements of the optical properties of materials. Using a four photo-detector quadrature configuration, a phase modulated ellipsometer was substantially miniaturized which has the ability to achieve a high precision detection limit. With a proven angular resolution of 0.0001 deg achieved by controlling the relative positions of a triangular prism, a paraboloidal and a spherical mirror pair, this new ellipsometer possesses a higher resolution than traditional complex mechanically controlled configurations. Moreover, the addition of an algorithm, FTA (fault tolerance algorithm) was adopted to compensate for the imperfections of the opto-mechanical system which can decrease system measurement reliability. This newly developed system requires only one millisecond or less to complete the measurement task without having to adopt any other modulation approach. The resolution achieved can be as high as 4x10(-7) RIU (refractive index unit) which is highly competitive when compared with other commercially available instruments. Our experimental results agreed well with the simulation data which confirms that our quadrature-based circularly polarized ellipsometer with FTA is an effective tool for precise detection of the optical properties of thin films. It also has the potential to be used to monitor the refractive index change of molecules in liquids. (C)2011 Optical Society of America
引用
收藏
页码:5431 / 5441
页数:11
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