Effect of atomic hydrogen on the acetylene-absorbed Si(100)(2x1) surface at room temperature

被引:0
作者
Chen, Y
Liu, ZH
Zhang, QZ
Feng, KA
Lin, ZD
机构
来源
ACTA PHYSICA SINICA-OVERSEAS EDITION | 1996年 / 5卷 / 06期
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O4 [物理学];
学科分类号
0702 ;
摘要
High resolution electron energy loss spectroscopy, low energy electron diffraction and quadrupole mass spectrometer (QMS) have been employed to study the effect of atomic hydrogen on the acetylene-saturated pre-adsorbed Si(100)(2 x 1) surface and the surface phase transition at room temperature. It is evident that the atomic hydrogen has a strong effect on the adsorbed C2H2 and the underlying surface structure of Si. The experimental results show that CH and CH2 radicals co-exist on the Si surface after the dosing of atomic hydrogen; meanwhile, the surface structure changes from Si(100)(2 x 1) to a dominant of (1 x 1). These results indicate that the atomic hydrogen can open C=C double bonds and change them into C-C single bonds, transfer the adsorbed C2H2 to C2Hx (x = 3,4) and break the underlying Si-Si dimer, but it cannot break the C-C bond intensively. The QMS results show that some C-4 species are formed during the dosing of atomic hydrogen. It may be the result of atomic hydrogen abstraction from C2Hx which leads to carbon catenation between two adjacent C-C dimers. The C-4 species formed are stable on Si(100) surfaces up to 1100 K, and can be regarded as the potential host of diamond nucleation.
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页码:450 / 455
页数:6
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