Growth of MgTiO3 thin films by pulsed laser deposition and their electrical properties

被引：9
|
作者：
Kang, S [1 ]
Lim, W [1 ]
Lee, J [1 ]
机构：
[1] Sungkyunkwan Univ, Dept Mat Engn, Suwon 440746, South Korea
来源：
INTEGRATED FERROELECTRICS | 2000年 / 31卷 / 1-4期
关键词：
MgTiO3; pulsed laser deposition; thin films; microwave;
D O I：
10.1080/10584580008215644
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
MgTiO3 thin films have been grown on various substrates by pulsed laser deposition (PLD) to investigate the application for microwave dielectrics and optical devices. Highly oriented MgTiO3 thin films were obtained on sapphire (c-plane Al2O3) MgTiO3 thin films deposited on SiO2/Si and platinized silicon (Pt/Ti/SiO2/Si) substrates were polycrystalline nature. MgTiO(3)thin films grown on sapphire were transparent in the visible and had a sharp absorption edge at 280 nm. These MgTiO3 thin films had extremely fine feature of surface morphology, i.e., rms roughness of 0.87 nm. Dielectric constant and loss of MgTiO3 thin films deposited by PLD were about 24 and 1.5% at 1MHz, respectively. These MgTiO3 thin films also exhibited little dielectric dispersion.
引用
收藏
页码：97 / 104
页数：8
相关论文
共 50 条
  • [1] The effect of deposition temperature and chamber pressure on the electrical and physical properties of the MgTiO3 thin films
    Chen, Yuan-Bin
    Huang, Cheng-Liang
    Lin, Shih-Hung
    JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 480 (02) : 897 - 902
  • [2] MgTiO3 thin films prepared by metalorganic solution deposition and their properties
    Choi, YH
    Lee, J
    THIN SOLID FILMS, 2001, 385 (1-2) : 43 - 47
  • [3] The effect of deposition temperature and RF power on the electrical and physical properties of the MgTiO3 thin films
    Huang, CL
    Chen, YB
    JOURNAL OF CRYSTAL GROWTH, 2005, 285 (04) : 586 - 594
  • [4] Electrical characterizations of MgTiO3 thin films grown on Si
    Ahn, S
    Lee, Y
    Roh, Y
    Kang, S
    Lee, J
    INTEGRATED FERROELECTRICS, 2000, 31 (1-4) : 359 - 366
  • [5] Formation of ilmenite-type single-crystalline MgTiO3 thin films by pulsed-laser deposition
    Negishi, Masamichi
    Fujiwara, Kohei
    Tsukazaki, Atsushi
    AIP ADVANCES, 2021, 11 (12)
  • [6] Structure and electrical properties of MgTiO3 thin films deposited by rf magnetron sputtering
    Huang, CL
    Pan, CL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (06): : 2440 - 2445
  • [7] Microwave dielectric properties of CaTiO3 and MgTiO3 thin films
    Lee, Byoung Duk
    Yoon, Ki Hyun
    Kim, Eung Soo
    Kim, Tae Hong
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2003, 42 (9 B): : 6158 - 6161
  • [8] Microwave dielectric properties of CaTiO3 and MgTiO3 thin films
    Lee, BD
    Yoon, KH
    Kim, ES
    Kim, TH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (9B): : 6158 - 6161
  • [9] Electrical properties of hydroxyapatite thin films grown by pulsed laser deposition
    Hontsu, S
    Matsumoto, T
    Ishii, J
    Nakamori, M
    Tabata, H
    Kawai, T
    THIN SOLID FILMS, 1997, 295 (1-2) : 214 - 217
  • [10] Electrical properties of ZnO thin films deposited by pulsed laser deposition
    Heluani, SP
    Simonelli, G
    Villafuerte, M
    Juarez, G
    Tirpak, A
    Braunstein, G
    Vignolo, F
    Progress in Compound Semiconductor Materials IV-Electronic and Optoelectronic Applications, 2005, 829 : 151 - 156
12345