Fabrication of concave microlens arrays using controllable dielectrophoretic force in template holes

被引：40

作者：

Li, Xiangming ^{[1
]}

Ding, Yucheng ^{[1
]}

Shao, Jinyou ^{[1
]}

Liu, Hongzhong ^{[1
]}

Tian, Hongmiao ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian 710049, Shaanxi, Peoples R China

来源：

OPTICS LETTERS | 2011年 / 36卷 / 20期

基金：

中国国家自然科学基金;

关键词：

FEMTOSECOND-LASER; GLASSES; LENS;

D O I：

10.1364/OL.36.004083

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This Letter presents a method for fabricating concave microlens arrays of UV-curable polymer by using the dielectrophoresis (DEP) force. The DEP force, generated by a voltage between the patterned conductive template and substrate, acting on the polymer-air interface, can drive the dielectric liquid polymer into the template holes and change the shape of the polymer-air interface. The upper polymer surface of fabricated microlens is super smooth, which can reduce optical noise. The upper surface geometry is measured approximately as parabolic in general, which can lead to a negligible spherical aberration, compared to spherical surfaces. (C) 2011 Optical Society of America

引用

页码：4083 / 4085

页数：3

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