A Novel Three-Dimensional Microheater

被引：24

作者：

Xu, Lei ^{[1
,2
]}

Li, Tie ^{[1
]}

Wang, Yuelin ^{[1
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol & Sci & Technol, Shanghai 200050, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China

来源：

IEEE ELECTRON DEVICE LETTERS | 2011年 / 32卷 / 09期

基金：

中国国家自然科学基金;

关键词：

Microheater; photoresist spray coating; power per active area (PPAA); 3-D; LOW-POWER CONSUMPTION; MICRO-HOTPLATE; MEMBRANE; SENSORS; DESIGN;

D O I：

10.1109/LED.2011.2160145

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This letter, for the first time, reports a novel 3-D microheater. A platinum (Pt) heating resistor fabricated by a photoresist-spray-coating-based lift-off process is embedded in a concave dielectric membrane. For thermal isolation, this concave membrane is connected to a bulk silicon chip via two slender beams with a silicon pit formed by anisotropic etching under it. A large active area of 46 960 mu m(2) can be heated to 400 degrees C at a power of 30 mW. A low power per active area of 6.39 x 10(-4) has been achieved, which is only half of or less than that in current 2-D microheaters.

引用

页码：1284 / 1286

页数：3

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