Fabrication and applications of subwavelength gratings

被引：0
|
作者：
Toyota, H [1 ]
Yu, W [1 ]
Okano, M [1 ]
Omori, S [1 ]
Yotsuya, T [1 ]
Kikuta, H [1 ]
Ichioka, Y [1 ]
机构：
[1] Osaka Sci & Technol Ctr, Izumi, Osaka 5941157, Japan
来源：
DIFFRACTIVE OPTICS AND MICRO-OPTICS, PROCEEDINGS VOLUME | 2002年 / 75卷
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have developed several kinds of diffractive optical elements with submicron structures. This paper describes the optical elements, such as antireflection structured surface, a high efficiency computer generated hologram, blazed grating with subwavelength structure and so on. A key technology of fabrication of them is a high-density plasma etching. The profiles of subwavelength structures are controlled by etching conditions. (c) 2002 Optical Society of America.
引用
收藏
页码：235 / 237
页数：3
相关论文
共 50 条
  • [1] Applications and fabrication of subwavelength gratings
    Schnieper, M
    Gale, MT
    Zschokke, C
    David, C
    DIFFRACTIVE OPTICS AND MICRO-OPTICS, PROCEEDINGS VOLUME, 2002, 75 : 238 - 240
  • [2] Fabrication and application of subwavelength gratings
    Schnabel, B
    Kley, EB
    MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MICROMECHANICS II, 1997, 3008 : 233 - 241
  • [3] Subwavelength transmission gratings and their applications in VCSELs
    Chou, SY
    Schablitsky, S
    Zhuang, L
    OPTOELECTRONIC INTEGRATED CIRCUITS II, 1997, 3290 : 73 - 81
  • [4] Laser Fabrication of Highly Ordered Nanocomposite Subwavelength Gratings
    Andreeva, Yaroslava
    Suvorov, Alexander
    Grigoryev, Evgeniy
    Khmelenin, Dmitry
    Zhukov, Mikhail
    Makin, Vladimir
    Sinev, Dmitry
    NANOMATERIALS, 2022, 12 (16)
  • [5] Templated fabrication of large area subwavelength antireflection gratings on silicon
    Sun, Chih-Hung
    Min, Wei-Lun
    Linn, Nicholas C.
    Jiang, Peng
    Jiang, Bin
    APPLIED PHYSICS LETTERS, 2007, 91 (23)
  • [6] Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings
    Uppsala Univ, Uppsala, Sweden
    Doktorsavh Chalmers Tek Hogsk, 1560 (1-5):
  • [7] Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings
    Nikolajeff, F
    Löfving, B
    Johansson, M
    Bengtsson, J
    Hård, S
    Heine, C
    APPLIED OPTICS, 2000, 39 (26) : 4842 - 4846
  • [8] A novel method for fabrication of free standing subwavelength gratings in GaAs/AlGaAs
    Tan, Dawn T. H.
    Faraji, Behnam
    Zangenberg, Nikolaj
    Tiedje, Tom
    Chrostowski, Lukas
    Bisaillon, Eric
    Plant, David V.
    2006 CANADIAN CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING, VOLS 1-5, 2006, : 1635 - +
  • [9] Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings
    Nikolajeff, Fredrik
    Löfving, Björn
    Johansson, Mathias
    Bengtsson, Jörgen
    Hård, Sverker
    Heine, Claus
    Applied Optics, 2000, 39 (26): : 4842 - 4846
  • [10] Optimal design of broadband antireflective subwavelength gratings for solar applications
    Huo, Furong
    Li, Yunfang
    To, Sandy
    Liu, Tianchen
    Xue, Changxi
    OPTIK, 2015, 126 (20): : 2626 - 2628
12345