Fiber-based distance sensing interferometry

被引:57
作者
Thurner, Klaus [1 ,2 ]
Quacquarelli, Francesca Paola [1 ]
Braun, Pierre-Francois [1 ]
Dal Savio, Claudio [1 ]
Karrai, Khaled [1 ]
机构
[1] Attocube Syst AG, D-80539 Munich, Germany
[2] Tech Univ Munich, Inst Nanoelect, D-80333 Munich, Germany
关键词
REFRACTIVE-INDEX; AIR; SENSORS; NONLINEARITY;
D O I
10.1364/AO.54.003051
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present an interferometric displacement sensor based on a folded low-finesse Fabry-Perot cavity. The fiber-optic sensor uses a quadrature detection scheme based on the wavelength modulation of a DFB laser. This enables measuring position changes over a range of 1 m for velocities up to 2 m/s. The sensor is well suited to work in extreme environments such as ultrahigh vacuum, cryogenic temperatures, or high magnetic fields and supports multichannel applications. The interferometer achieves a repeatability of 0.44 nm(3 sigma) at a working distance of 20 mm, a resolution of 1 pm, and an accuracy of 1 nm. (C) 2015 Optical Society of America
引用
收藏
页码:3051 / 3063
页数:13
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