The temperature gradients and distribution evolution within the crystal domain in Czochralski crystal growth process have important role in produced crystal's quality. Precise and tight regulation of temperature distribution and gradients is the most promising approach to ensure the crystal quality. In this work, the coupled crystal pulling dynamics and heat transfer models in Czochralski crystal growth with a time-varying boundary is considered. The moving boundary finite element method is used to obtain the optimal reference temperature trajectory associated with the reference crystal shape taking into account constraints on input and the temperature gradients. The obtained reference trajectory is used to implement a model predictive control strategy to track the reference temperature despite uncertainties in crystal domain geometry evolution and disturbances. Finally, the proposed method is implemented on a high fidelity finite element process model with non-planar interface and results are presented to validate the success of the proposed methodology. (C) 2014 Elsevier Ltd. All rights reserved.
机构:
Univ Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USA
Armaou, A
;
Christofides, PD
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Univ Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USA
机构:
Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Cao Jianwei
;
Gao Yu
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机构:
GRINM Semicond Mat Co Ltd, Beijing 100088, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Gao Yu
;
Chen Ying
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Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Chen Ying
;
Zhang Guohu
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GRINM Semicond Mat Co Ltd, Beijing 100088, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Zhang Guohu
;
Qiu Minxiu
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Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
机构:
Univ Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USA
Armaou, A
;
Christofides, PD
论文数: 0引用数: 0
h-index: 0
机构:
Univ Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USAUniv Calif Los Angeles, Sch Engn & Appl Sci, Dept Chem Engn, Los Angeles, CA 90095 USA
机构:
Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Cao Jianwei
;
Gao Yu
论文数: 0引用数: 0
h-index: 0
机构:
GRINM Semicond Mat Co Ltd, Beijing 100088, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Gao Yu
;
Chen Ying
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h-index: 0
机构:
Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Chen Ying
;
Zhang Guohu
论文数: 0引用数: 0
h-index: 0
机构:
GRINM Semicond Mat Co Ltd, Beijing 100088, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China
Zhang Guohu
;
Qiu Minxiu
论文数: 0引用数: 0
h-index: 0
机构:
Zhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R ChinaZhejiang Univ, State Key Lab Fluid Power Transmiss & Control, Hangzhou 310027, Peoples R China