IN-SITU X-RAY REFLECTIVITY MEASUREMENT OF THIN FILM GROWTH

被引:0
|
作者
Lee, Chih-Hao [1 ]
Tseng, Sung-Yuh [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Nucl Engn & Engn Phys, Hsinchu 30043, Taiwan
关键词
D O I
10.1107/S0108767396080609
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
PS12.03.09
引用
收藏
页码:C473 / C473
页数:1
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