IN-SITU X-RAY REFLECTIVITY MEASUREMENT OF THIN FILM GROWTH

被引：0
|
作者：
Lee, Chih-Hao [1 ]
Tseng, Sung-Yuh [1 ]
机构：
[1] Natl Tsing Hua Univ, Dept Nucl Engn & Engn Phys, Hsinchu 30043, Taiwan
来源：
ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES | 1996年 / 52卷
关键词：
D O I：
10.1107/S0108767396080609
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
PS12.03.09
引用
收藏
页码：C473 / C473
页数：1
相关论文
共 50 条
  • [31] Indentation response of a superlattice thin film revealed by in-situ scanning X-ray nanodiffraction
    Todt, J.
    Krywka, C.
    Zhang, Z. L.
    Mayrhofer, P. H.
    Keckes, J.
    Bartosik, M.
    ACTA MATERIALIA, 2020, 195 : 425 - 432
  • [32] Stability of thermoresponsive methylcellulose thin film: x-ray reflectivity study
    Innis-Samson, Vallerie Ann
    Sakurai, Kenji
    X-RAY SPECTROMETRY, 2009, 38 (05) : 376 - 381
  • [33] X-ray reflectivity characterisation of thin-film and multilayer structures
    Zaumseil, P
    Materials for Information Technology: Devices, Interconnects and Packaging, 2005, : 497 - 505
  • [34] Energy-dispersive x-ray reflectivity and the measurement of thin film density for interlevel dielectric optimization
    Wallace, WE
    Chiang, CK
    Wu, WL
    CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 475 - 477
  • [35] Characterization of multilayers of thin films by measurement of X-ray specular reflectivity
    Durand, O
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2002, 57 (304): : 387 - 429
  • [36] IN-SITU SYNCHROTRON X-RAY REFLECTIVITY MEASUREMENTS AT THE CALCITE-WATER INTERFACE
    CHIARELLO, RP
    WOGELIUS, RA
    STURCHIO, NC
    GEOCHIMICA ET COSMOCHIMICA ACTA, 1993, 57 (16) : 4103 - 4110
  • [37] Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering
    Ellmer, K
    Mientus, R
    Weiss, V
    Rossner, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2001, 467 : 1041 - 1044
  • [38] Development of a compact system for in-situ x-ray scattering studies of organic thin film deposition
    Headrick, RL
    Malliaras, GG
    Mayer, AC
    Deyhim, AK
    Hunt, AC
    SYNCHROTRON RADIATION INSTRUMENTATION, 2004, 705 : 1150 - 1153
  • [39] X-Ray Reflectivity and Photoelectron Spectroscopy Study of Aluminum Oxide Thin Film
    Sinha, Mangalika
    Modi, Mohammed H.
    61ST DAE-SOLID STATE PHYSICS SYMPOSIUM, 2017, 1832
  • [40] Fixed-angle, energy-dispersive X-ray reflectivity measurement of thin tantalum film thickness
    Windover, D
    Barnat, E
    Summers, J
    Lu, TM
    Kumar, A
    Bakhru, H
    Lee, SL
    JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (08) : 848 - 856
12345