The future of atom probe tomography

被引:68
作者
Miller, Michael K. [1 ]
Kelly, Thomas. F. [2 ]
Rajan, Krishna [3 ]
Ringer, Simon P. [4 ]
机构
[1] Oak Ridge Natl Lab, Div Mat Sci & Technol, Oak Ridge, TN 37831 USA
[2] Cameca Instruments Inc, Madison, WI 53711 USA
[3] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA
[4] Univ Sydney, Australian Ctr Microscopy & Microanal, Sydney, NSW 2006, Australia
基金
澳大利亚研究理事会; 美国国家科学基金会;
关键词
SPECIMEN PREPARATION; RECONSTRUCTION; IMPLEMENTATION; DISLOCATIONS; MICROSCOPY; RESOLUTION;
D O I
10.1016/S1369-7021(12)70069-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
History has taught us that every time a new form of microscopy or type of microscope is introduced, major advances are made in the understanding of materials. For example, the light or optical microscope introduced the world to microbes and micro-organisms around 1600 AD, and the electron microscope to dislocations in materials over 50 years ago(1-3). Today many different forms of microscopy have been developed but the ultimate goal of seeing, accurately locating, and identifying all the atoms in a specimen is still elusive. Atom probe tomography and electron microscopy are the mainstays of atomic resolution microscopy of bulk materials. However, neither technique can accomplish this goal in the bulk of a specimen at the present time.
引用
收藏
页码:158 / 165
页数:8
相关论文
共 70 条
  • [1] A GENERAL PROTOCOL FOR THE RECONSTRUCTION OF 3D ATOM-PROBE DATA
    BAS, P
    BOSTEL, A
    DECONIHOUT, B
    BLAVETTE, D
    [J]. APPLIED SURFACE SCIENCE, 1995, 87-8 (1-4) : 298 - 304
  • [2] Three-dimensional atomic-scale imaging of impurity segregation to line defects
    Blavette, D
    Cadel, E
    Fraczkiewicz, A
    Menand, A
    [J]. SCIENCE, 1999, 286 (5448) : 2317 - 2319
  • [3] DIRECTION AND DEPTH OF ATOM PROBE ANALYSIS
    BLAVETTE, D
    SARRAU, JM
    BOSTEL, A
    GALLOT, J
    [J]. REVUE DE PHYSIQUE APPLIQUEE, 1982, 17 (07): : 435 - 440
  • [4] INTERFERENCE EFFECTS IN THE ELECTRON MICROSCOPY OF THIN CRYSTAL FOILS
    BOLLMANN, W
    [J]. PHYSICAL REVIEW, 1956, 103 (05): : 1588 - 1589
  • [5] Subnanosecond time response of large-area superconducting stripline detectors for keV molecular ions
    Casaburi, A.
    Zen, N.
    Suzuki, K.
    Ejrnaes, M.
    Pagano, S.
    Cristiano, R.
    Ohkubo, M.
    [J]. APPLIED PHYSICS LETTERS, 2009, 94 (21)
  • [6] THE FIM100 - PERFORMANCE OF A COMMERCIAL ATOM PROBE SYSTEM
    CEREZO, A
    SMITH, GDW
    WAUGH, AR
    [J]. JOURNAL DE PHYSIQUE, 1984, 45 (NC9): : 329 - 335
  • [7] IMPROVEMENTS IN 3-DIMENSIONAL ATOM-PROBE DESIGN
    CEREZO, A
    GODFREY, TJ
    HYDE, JM
    SIJBRANDIJ, SJ
    SMITH, GDW
    [J]. APPLIED SURFACE SCIENCE, 1994, 76 (1-4) : 374 - 381
  • [8] APPLICATION OF A POSITION-SENSITIVE DETECTOR TO ATOM PROBE MICROANALYSIS
    CEREZO, A
    GODFREY, TJ
    SMITH, GDW
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (06) : 862 - 866
  • [9] Overview: Recent progress in three-dimensional atom probe instruments and applications
    Cerezo, Alfred
    Clifton, Peter H.
    Lozano-Perez, Sergio
    Panayi, Peter
    Sha, Gang
    Smith, George D. W.
    [J]. MICROSCOPY AND MICROANALYSIS, 2007, 13 (06) : 408 - 417
  • [10] Implementation of an optical TAP: preliminary results
    Deconihout, B
    Renaud, L
    Da Costa, G
    Bouet, M
    Bostel, A
    Blavette, D
    [J]. ULTRAMICROSCOPY, 1998, 73 (1-4) : 253 - 260