Thickness measurement of organic films using Compton scattering of characteristic X-rays

被引:13
作者
Kim, Jong-Yun [1 ]
Choi, Yong Suk [1 ]
Park, Yong Joon [1 ]
Song, Kyuseok [1 ]
Jung, Sung-Hee [2 ]
Hussein, Esam M. A. [3 ]
机构
[1] Korea Atom Energy Res Inst, Nucl Chem Res Div, Taejon 305353, South Korea
[2] Korea Atom Energy Res Inst, Div Radioisotope R&D, Taejon 305353, South Korea
[3] Univ New Brunswick, Dept Mech Engn, Lab Threat Mat Detect, Fredericton, NB E3B 5A3, Canada
关键词
Thickness gauge; Organic films; Compton scattering; Characteristic X-ray; SPECTROMETRY;
D O I
10.1016/j.apradiso.2011.03.048
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
An X-ray scattering method is presented for determining the thickness of an organic film placed on a steel substrate. The strong peaks of characteristic X-rays are taken as an advantage to measure the intensity of backscattered photons. It is shown that the intensity of Compton scattering of characteristic X-rays is proportional to film thickness, up to the thickness of 250 mu m of acrylic adhesive layers. In addition, the measurement time was 300 ms, providing a simple and convenient method for on-line for thickness monitoring. (C) 2011 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1241 / 1245
页数:5
相关论文
共 20 条
[1]   SiO2 thickness determination by x-ray photoelectron spectroscopy, Auger electron spectroscopy, secondary ion mass spectrometry, Rutherford backscattering, transmission electron microscopy, and ellipsometry [J].
Cole, DA ;
Shallenberger, JR ;
Novak, SW ;
Moore, RL ;
Edgell, MJ ;
Smith, SP ;
Hitzman, CJ ;
Kirchhoff, JF ;
Principe, E ;
Nieveen, W ;
Huang, FK ;
Biswas, S ;
Bleiler, RJ ;
Jones, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (01) :440-444
[2]   Determination of thicknesses and interface roughnesses of GaAs-based and InAs/AlSb-based heterostructures by X-ray reflectometry [J].
Durand, O ;
Berger, V ;
Bisaro, R ;
Bouchier, A ;
De Rossi, A ;
Marcadet, X ;
Prévot, I .
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2001, 4 (1-3) :327-330
[3]   Determination of the thickness of coatings by means of a new XRF spectrometer [J].
Fiorini, C ;
Gianoncelli, A ;
Longoni, A ;
Zaraga, F .
X-RAY SPECTROMETRY, 2002, 31 (01) :92-99
[4]   A semi-empirical model for a 90Sr beta-particle transmission thickness gauge for aluminum alloys [J].
Gardner, RP ;
Metwally, WA ;
Shehata, A .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2004, 213 :357-363
[5]   SCATTERED X-RAY-BEAM NONDESTRUCTIVE TESTING [J].
HARDING, G ;
KOSANETZKY, J .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1989, 280 (2-3) :517-528
[6]  
Harris D., 2019, Quantitative Chemical Analysis, V10
[7]  
HENDERSON SD, 2002, HDB ACCELERATOR PHYS, P231
[8]   Non-contact thickness gauging of aluminium strip using EMAT technology [J].
Hobbis, A. ;
Aruleswaran, A. .
NONDESTRUCTIVE TESTING AND EVALUATION, 2005, 20 (04) :211-220
[9]  
Hubbell J.H., 1987, XCOM PHOTON CROSS SE
[10]  
Hussein E.M.A., 2003, HDB RAD PROBING GAUG