Fabrication of atomically smooth SrRuO3 thin films by laser molecular beam epitaxy

被引：3

作者：

Liu GuoZhen ^{[1
]}

He Meng ^{[1
]}

Jin KuiJuan ^{[1
]}

Yang GuoZhen ^{[1
]}

Lue HuiBin ^{[1
]}

Zhao Kun ^{[2
]}

Zheng ShiJian ^{[3
]}

Ma XiuLiang ^{[3
]}

机构：

[1] Chinese Acad Sci, Beijing Natl Lab Condensed Matter Phys, Inst Phys, Beijing 100080, Peoples R China

[2] China Univ Petr, Dept Math & Phys, Beijing 102249, Peoples R China

[3] Chinese Acad Sci, Shenyang Natl Lab Mat Sci, Inst Met Res, Shenyang 110016, Peoples R China

来源：

SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY | 2008年 / 51卷 / 07期

基金：

中国国家自然科学基金;

关键词：

SrRuO3 thin film; laser molecular beam epitaxy; surface morphology;

D O I：

10.1007/s11433-008-0080-z

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

High-quality SrRuO3 (SRO) thin films and SrTiO3/SRO bilayer were grown epitaxially on SrTiO3 (STO)(001) substrates by laser molecular beam epitaxy. The results of in situ observation of reflection high-energy electron diffraction and ex situ X-ray diffraction theta-2 theta scan indicate that the SRO thin films have good crystallinity. The measurements of atomic force microscopy and scan tunneling microscopy reveal that the surface of the SRO thin film is atomically smooth. The resistivity of the SRO thin film is 300 mu Omega center dot cm at room temperature. Furthermore, the transmission electron microscopy study shows that the interfaces of STO/SRO and SRO/STO are very clear and no interfacial reaction layer was observed. The experimental results show that the SRO thin film is an excellent electrode material for devices based on perovskite oxide materials.

引用

页码：745 / 749

页数：5

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