Self-assembled monolayer compatible with metal surface acoustic wave devices on lithium niobate

被引：18
作者：
Nihonyanagi, Satoshi [1 ]
Eftekhari-Bafrooei, Ali [1 ]
Hines, Jacqueline [1 ]
Borguet, Eric [1 ]
机构：
[1] Temple Univ, Dept Chem, Philadelphia, PA 19122 USA
来源：
LANGMUIR | 2008年 / 24卷 / 09期
关键词：
D O I：
10.1021/la702024x
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
The formation of a siloxane self-assembled monolayer (SAM) film on a lithium niobate substrate was investigated for surface acoustic wave (SAW) sensor devices for the detection of hydrogen. The most widely used SAM coupling reagent, octadecyltrichlorosilane, etches aluminum metal features that are integral to sensor devices, due to the formation of high local concentrations of hydrochloric acid. An alternative coupling reagent, octadecyltrimethoxysilane (OTMS), does not show any etching of metal parts. OTMS and related molecules are compatible with conventional SAW device manufacturing techniques and other devices that contain metal features susceptible to etching by acid released in the SAM formation process.
引用
收藏
页码：5161 / 5165
页数：5
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共 39 条
  • [1] Functionalization of indium tin oxide
    Bermudez, Victor M.
    Berry, Alan D.
    Kim, Heungsoo
    Pique, Alberto
    [J]. LANGMUIR, 2006, 22 (26) : 11113 - 11125
  • [2] Chen C. H., 2006, Appl. Phys. Lett, P89
  • [3] Phase separation of a mixed self-assembled monolayer prepared via a stepwise method
    Choi, Inhee
    Kim, Younghun
    Kang, Sung Koo
    Lee, Jeongjin
    Yi, Jongheop
    [J]. LANGMUIR, 2006, 22 (11) : 4885 - 4889
  • [4] FORMATION OF POLYPEPTIDE-DYE MULTILAYERS BY AN ELECTROSTATIC SELF-ASSEMBLY TECHNIQUE
    COOPER, TM
    CAMPBELL, AL
    CRANE, RL
    [J]. LANGMUIR, 1995, 11 (07) : 2713 - 2718
  • [5] Formation of dense self-assembled monolayers of (n-decyl)trichlorosilanes on Ta/Ta2O5
    De Palma, Randy
    Laureyn, Wim
    Frederix, Filip
    Bonroy, Kristien
    Pireaux, Jean-Jaques
    Borghs, Gustaaf
    Maes, Guido
    [J]. LANGMUIR, 2007, 23 (02) : 443 - 451
  • [6] Modified-RNA aptamer-based sensor for competitive impedimetric assay of neomycin B
    de-los-Santos-Alvarez, Noemi
    Lobo-Castanon, Maria Jesus
    Miranda-Ordieres, Arturo J.
    Tunon-Blanco, Paulino
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2007, 129 (13) : 3808 - +
  • [7] Hydrogen sensors and switches from electrodeposited palladium mesowire arrays
    Favier, F
    Walter, EC
    Zach, MP
    Benter, T
    Penner, RM
    [J]. SCIENCE, 2001, 293 (5538) : 2227 - 2231
  • [8] SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films:: Response to H2 and O3 gases
    Fechete, A. C.
    Wlodarski, W.
    Kalantar-Zadeh, K.
    Holland, A. S.
    Antoszewski, J.
    Kaciulis, S.
    Pandolfi, L.
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 2006, 118 (1-2) : 362 - 367
  • [9] Grafting of polypeptides on solid substrates by initiation of N-carboxyanhydride polymerization by amino-terminated self-assembled monolayers
    Heise, A
    Menzel, H
    Yim, H
    Foster, MD
    Wieringa, RH
    Schouten, AJ
    Erb, V
    Stamm, M
    [J]. LANGMUIR, 1997, 13 (04) : 723 - 728
  • [10] Formation and characterization of self-assembled monolayers of octadecyltrimethoxysilane on chromium: Application in low-energy electron lithography
    Hild, R
    David, C
    Muller, HU
    Volkel, B
    Kayser, DR
    Grunze, M
    [J]. LANGMUIR, 1998, 14 (02) : 342 - 346
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