A new simple method for suppression of influence of rf plasma oscillations during Langmuir probe measurements

被引：1

作者：

Spatenka, P ^{[1
]}

Brunnhofer, V ^{[1
]}

机构：

[1] ACAD SCI CZECH REPUBL, INST ENTOMOL, CR-37005 CESKE BUDEJOVICE, CZECH REPUBLIC

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 1996年 / 7卷 / 07期

关键词：

D O I：

10.1088/0957-0233/7/7/010

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new and simple method for broad-band suppression of rf current in Langmuir probes is proposed. The method uses the resistive impedance of ferrite core chokes with a low cut-off frequency. Measurements in a planar reactor at 13.56 Mhz demonstrated the effectiveness of this method.

引用

页码：1065 / 1067

页数：3

共 11 条

[1] ALLEN JE, 1994, PROBE THEORIE APPL M
[2] AN ELECTROSTATIC-PROBE TECHNIQUE FOR RF PLASMA
BRAITHWAITE, NS
BENJAMIN, NMP
ALLEN, JE
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1987, 20 (08): : 1046 - 1049
[3] ELECTRON-ENERGY DISTRIBUTION FUNCTION MEASUREMENTS IN CAPACITIVELY COUPLED RF DISCHARGES
DILECCE, G
CAPITELLI, M
DEBENEDICTIS, S
[J]. JOURNAL OF APPLIED PHYSICS, 1991, 69 (01) : 121 - 128
[4] FLENDER U, 1996, UNPUB PLASMA SOURCES
[5] INVESTIGATION OF AN RF PLASMA WITH SYMMETRICAL AND ASYMMETRICAL ELECTROSTATIC PROBES
GAGNE, RRJ
CANTIN, A
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (06) : 2639 - &
[6] Measurements of electron energy distribution in low-pressure RF discharges
Godyak, V. A.
Piejak, R. B.
Alexandrovich, B. M.
[J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) : 36 - 58
[7] SPACE-RESOLVED AND DIRECTION-RESOLVED LANGMUIR PROBE DIAGNOSTIC IN RF PLANAR DISCHARGES
KLAGGE, S
[J]. PLASMA CHEMISTRY AND PLASMA PROCESSING, 1992, 12 (02) : 103 - 128
[8] PETIG M, 1993, 921724 RUHR U BOCH
[9] LANGMUIR PROBE MEASUREMENTS OF AXIAL VARIATION OF PLASMA PARAMETERS IN 27.1 MHZ RF OXYGEN PLANAR DISCHARGES
SABADIL, H
KLAGGE, S
KAMMEYER, M
[J]. PLASMA CHEMISTRY AND PLASMA PROCESSING, 1988, 8 (04) : 425 - 444
[10] PROBE MEASUREMENTS IN AN RF PLASMA REACTOR WITH PLANAR ELECTRODES
SPATENKA, P
[J]. CZECHOSLOVAK JOURNAL OF PHYSICS, 1988, 38 (09) : 996 - 1004

← 1 2 →