Femtosecond Laser Fabrication of Cavity Microball Lens (CMBL) inside a PMMA Substrate for Super-Wide Angle Imaging

被引:73
作者
Zheng, Chong [1 ,2 ]
Hu, Anming [1 ,2 ]
Kihm, Kenneth D. [2 ]
Ma, Qian [2 ]
Li, Ruozhou [2 ,3 ]
Chen, Tao [1 ]
Duley, W. W. [4 ]
机构
[1] Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
[2] Univ Tennessee, Dept Mech Aerosp & Biomed Engn, Knoxville, TN 37996 USA
[3] Southeast Univ, Sch Elect Sci & Engn, Key Lab Microinertial Instrument & Adv Nav Techno, Minist Educ, Nanjing 210096, Jiangsu, Peoples R China
[4] Univ Waterloo, Dept Phys & Astron, Waterloo, ON N2L 3G1, Canada
基金
北京市自然科学基金; 中国国家自然科学基金;
关键词
cavity microball lens; femtosecond lasers; micromachining; micro-telescope; wide angle imaging; MICROLENS ARRAY; EXCIMER-LASER; PHOTOSENSITIVE GLASS; POLYMER MICROLENS; WAVE-GUIDES; RESOLUTION; COMPOUND; SYSTEM; FIELD; MICROFABRICATION;
D O I
10.1002/smll.201403419
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Since microlenses have to date been fabricated primarily by surface manufacturing, they are highly susceptible to surface damage, and their microscale size makes it cumbersome to handle. Thus, cavity lenses are preferred, as they alleviate these difficulties associated with the surface-manufactured microlenses. Here, it is shown that a high repetition femtosecond laser can effectively fabricate cavity microball lenses (CMBLs) inside a polymethyl methacrylate slice. Optimal CMBL fabrication conditions are determined by examining the pertinent parameters, including the laser processing time, the average irradiation power, and the pulse repetition rates. In addition, a heat diffusion modeling is developed to better understand the formation of the spherical cavity and the slightly compressed affected zone surrounding the cavity. A micro-telescope consisting of a microscope objective and a CMBL demonstrates a super-wide field-of-view imaging capability. Finally, detailed optical characterizations of CMBLs are elaborated to account for the refractive index variations of the affected zone. The results presented in the current study demonstrate that a femtosecond laser-fabricated CMBL can be used for robust and super-wide viewing micro imaging applications.
引用
收藏
页码:3007 / 3016
页数:10
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