Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

被引：6

作者：

Liu, Hongmei ^{[1
,2
]}

Zhao, Quanliang ^{[2
]}

Qiu, Chengjun ^{[1
,2
]}

Cao, Maosheng ^{[2
]}

机构：

[1] Heilongjiang Univ, Key Lab Integrated Circuit, Harbin 150080, Peoples R China

[2] Beijing Inst Technol, Sch Mat Sci & Engn, Beijing 100081, Peoples R China

来源：

HIGH-PERFORMANCE CERAMICS V, PTS 1 AND 2 | 2008年 / 368-372卷

关键词：

PZT; thick film; sol-gel; cantilever beam;

D O I：

10.4028/www.scientific.net/KEM.368-372.223

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/SiO2/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 mu m was obtained after annealing at 650 degrees C for 2 h and it has the saturation polarization of 54 mu C/cm(2), the remnant polarization of 30 mu C/cm(2) and the coercive field of 50 kV/cm.

引用

页码：223 / +

页数：2

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