Principles of interference microscopy for the measurement of surface topography

被引：296
作者：
de Groot, Peter [1 ]
机构：
[1] Zygo Corp, Middlefield, CT 06455 USA
来源：
ADVANCES IN OPTICS AND PHOTONICS | 2015年 / 7卷 / 01期
关键词：
THICKNESS-PROFILE MEASUREMENT; WHITE-LIGHT INTERFEROMETRY; THIN-FILM; PHASE-CHANGE; METROLOGY; ERROR; NOISE; PROFILOMETER; INSTRUMENTS; CALIBRATION;
D O I：
10.1364/AOP.7.000001
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Interference microscopy plays a central role in noncontact strategies for process development and quality control, providing full 3D measurement of surface characteristics that influence the functional behavior of manufactured parts. Here I briefly review the history and principles of this important technique, then concentrate on the details of hardware, software, and applications of interference microscopy using phase-shifting and coherence scanning measurement principles. Recent advances considered here include performance improvements, vibration robustness, full color imaging, accommodation of highly sloped surfaces, correlation to contact methods, transparent film analysis, and international standardization of calibration and specification. (C) 2015 Optical Society of America
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页码：1 / 65
页数：65
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