Ion-pair chromatography of bis sodium-sulfopropyl) disulfide brightener in acidic copper plating baths

被引:19
作者
Palmans, R
Claes, S
Vanatta, LE
Coleman, DE
机构
[1] IMEC, B-3001 Louvain, Belgium
[2] Katholieke Hogesch Leuven, Dept Rega, B-3000 Louvain, Belgium
[3] Air Liquide Balazs, Analyt Serv, Dallas, TX 75265 USA
[4] ALCOA, Ctr Tech, MSTC, Alcoa Ctr, PA 15069 USA
关键词
ion-pair chromatography; SPS; bis (sodium-sulfopropyl) disultide; 4,5-dithiaoctane-1,8-disulfonic acid; 3-(mercaptopropane) sulfortic acid; MPS; brightener additive; acidic copper plating bath; regression statistics;
D O I
10.1016/j.chroma.2005.02.042
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
Quantitative analysis of the brightener component his (sodium-sulfopropyl) disulfide (SPS) in acidic copper plating baths poses a real challenge due to the complex chemical matrix containing large amounts of Cu(II) ion and sulfuric acid together with other organic additives and additive decomposition products. We developed a new ion-pair chromatography method to analyze micro-molar amounts of SPS directly in plating bath samples without the need for sample pre-treatment. Addition of tetra-N-methylammonium cation as ion-pairing agent to a methanol-sulfuric acid-water eluent increases the retention time of the anionic SpS(2-) on a C-18 column sufficiently to separate this compound from Cu(II) ion and additive by-products. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:147 / 154
页数:8
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