Application of Cu-polyimide flex circuit and Al-on-glass pitch adapter for the ATLAS SCT barrel hybrid

被引:12
作者
Unno, Y
Kohriki, T
Ikegami, Y
Kondo, T
Terada, S
Ujiie, N
Hara, K
Iwata, Y
Ohsugi, T
Takashima, R
Nakano, I
Tanaka, R
机构
[1] KEK, High Energy Acceleratro Res Org, Inst Particle & Nucl Studies, Tsukuba, Ibaraki 3050801, Japan
[2] Univ Tsukuba, Inst Phys, Tsukuba, Ibaraki 3058571, Japan
[3] Hiroshima Univ, Dept Phys, Higashihiroshima 7398526, Japan
[4] Kyoto Univ, Fushimi Ku, Kyoto 6120863, Japan
[5] Okayama Univ, Dept Phys, Okayama 7008530, Japan
关键词
hybrid; flex circuit; Al-on-glass; pitch adapter; wire bonding;
D O I
10.1016/j.nima.2005.01.068
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We applied the surface build-up Cu-polyimide flex-circuit technology with laser vias to the ATLAS SCT barrel hybrid to be made in one piece from the connector to the electronics sections including cables. The hybrids, reinforced with carbon-carbon substrates, provide mechanical strength, thermal conductivity, low-radiation length, and stability in application-specific integrated circuit (ASIC) operation. By following the design rules, we experienced little trouble in breaking the traces. The pitch adapter between the sensor and the ASICs was made of aluminum traces on glass substrate. We identified that the generation of whiskers around the wire-bonding feet was correlated with the hardness of metallized aluminum. The appropriate hardness has been achieved by keeping the temperature of the glasses as low as room temperature during the metallization. The argon plasma cleaning procedure cleaned the contamination on the gold pads of the hybrids for successful wire bonding, although it was unsuccessful in the aluminum of the pitch adapters. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:286 / 294
页数:9
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