Comparison of microactuators based on piezoelectric layered plates with d31 and d33 coupling

被引：0

作者：

Nguyen, Cuong H. ^{[1
]}

Hanke, Ulrik ^{[1
]}

Halvorsen, Einar ^{[1
]}

机构：

[1] Univ Coll Southeast Norway, Dept Micro & Nanosyst Technol, Campus Vestfold, N-3184 Borre, Norway

来源：

ACTIVE AND PASSIVE SMART STRUCTURES AND INTEGRATED SYSTEMS 2016 | 2016年 / 9799卷

关键词：

interdigital electrode; thin film piezoelectric; micro-actuator; layered structure; STATIC DEFLECTIONS; DESIGN; MODEL; MEMS;

D O I：

10.1117/12.2218843

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, analytical models of partially covered piezoelectric plate actuators operated with longitudinal (d(33)) or transveral (d(31)) coupling are developed. The models are based on classical laminated plate theory and linear piezoelectricity. Explicit formulas have been derived for thin piezoelectric films and the optimal structural dimensions are determined. A performance comparison between the two modes of operation is carried out. Finite element analysis validates the analytic models. Finally, the performance of an actuator with an interdigital-electrode-based longitudinal coupling is compared with its counterpart transversally coupled actuator. The comparison determines the stronger actuator when operation is electric-field-strength limited.

引用

页数：10

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