Formation trends of ordered self-assembled nanoislands on stepped substrates

被引:4
|
作者
Liang, S. [1 ]
Zhu, H. L. [1 ]
Kong, D. H. [1 ]
Wang, W. [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat, Beijing 100083, Peoples R China
基金
中国国家自然科学基金;
关键词
CHEMICAL-VAPOR-DEPOSITION; INAS QUANTUM DOTS; MOLECULAR-BEAM EPITAXY; GAAS; SURFACES; ISLANDS; GROWTH; FABRICATION; MIGRATION; ARRAYS;
D O I
10.1063/1.3490184
中图分类号
O59 [应用物理学];
学科分类号
摘要
The growth of ordered self-assembled nanoislands on stepped substrates is studied systematically by kinetic Monte Carlo simulations. As the terrace width is small, the formation of nanoislands is confined in the steps and nanoislands ordered in lines or nanowires can be obtained. The Schwoebel barrier at the step edges has a great influence on the evolution of both the size and space distributions of the islands. When the terrace width is relatively large, self-ordering of nanoislands in the center regions of the terraces happens. An unexpected trend of the nanoisland self-ordering is found as the deposition thickness is larger than 0.2 ML, which can be related to the attractive migrations between nearby islands. (C) 2010 American Institute of Physics. [doi:10.1063/1.3490184]
引用
收藏
页数:5
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