Improved optomechanical disk resonator sitting on a pedestal mechanical shield

被引：18

作者：

Dac Trung Nguyen ^{[1
]}

Hease, William ^{[1
]}

Baker, Christopher ^{[1
]}

Gil-Santos, Eduardo ^{[1
]}

Senellart, Pascale ^{[2
]}

Lemaitre, Aristide ^{[2
]}

Ducci, Sara ^{[1
]}

Leo, Giuseppe ^{[1
]}

Favero, Ivan ^{[1
]}

机构：

[1] Univ Paris Diderot, CNRS, Sorbonne Paris Cite, Mat & Phenomenes Quant, F-75013 Paris, France

[2] CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, France

来源：

NEW JOURNAL OF PHYSICS | 2015年 / 17卷

基金：

欧洲研究理事会;

关键词：

optomechanics; disk resonator; mechanical shield; quality factor; gallium arsenide; LAG REDUCTION;

D O I：

10.1088/1367-2630/17/2/023016

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We experimentally demonstrate the controlled enhancement of the mechanical quality factor Q of gallium arsenide disk optomechanical resonators. Disks vibrating at 1.3 GHz with a mechanical shield integrated in their pedestal show a Q improvement by a factor 10-16. The structure is modeled numerically and different modes of vibration are observed, which shed light on the Q enhancement mechanism. An optimized double-disk geometry is presented that promises Q above the million for a large parameter range.

引用

页数：7

共 19 条

[1] GAAS, ALAS, AND ALXGA1-XAS - MATERIAL PARAMETERS FOR USE IN RESEARCH AND DEVICE APPLICATIONS
ADACHI, S
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (03) : R1 - R29
[2] Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap
Alegre, Thiago P. Mayer
Safavi-Naeini, Amir
Winger, Martin
Painter, Oskar
[J]. OPTICS EXPRESS, 2011, 19 (06): : 5658 - 5669
[3] [Anonymous], 2007, IEEE T ULTRASON FERR, V54, P251
[4] Cavity optomechanics
Aspelmeyer, Markus
Kippenberg, Tobias J.
Marquardt, Florian
[J]. REVIEWS OF MODERN PHYSICS, 2014, 86 (04) : 1391 - 1452
[5] Critical optical coupling between a GaAs disk and a nanowaveguide suspended on the chip
Baker, C.
Belacel, C.
Andronico, A.
Senellart, P.
Lemaitre, A.
Galopin, E.
Ducci, S.
Leo, G.
Favero, I.
[J]. APPLIED PHYSICS LETTERS, 2011, 99 (15)
[6] Photoelastic coupling in gallium arsenide optomechanical disk resonators
Baker, Christopher
Hease, William
Dac-Trung Nguyen
Andronico, Alessio
Ducci, Sara
Leo, Giuseppe
Favero, Ivan
[J]. OPTICS EXPRESS, 2014, 22 (12): : 14072 - 14086
[7] SEMICONDUCTING AND OTHER MAJOR PROPERTIES OF GALLIUM-ARSENIDE
BLAKEMORE, JS
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (10) : R123 - R181
[8] High-Q UHF micromechanical radial-contour mode disk resonators
Clark, JR
Hsu, WT
Abdelmoneum, MA
Nguyen, CTC
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (06) : 1298 - 1310
[9] Phonon-tunnelling dissipation in mechanical resonators
Cole, Garrett D.
Wilson-Rae, Ignacio
Werbach, Katharina
Vanner, Michael R.
Aspelmeyer, Markus
[J]. NATURE COMMUNICATIONS, 2011, 2
[10] Wavelength-sized GaAs optomechanical resonators with gigahertz frequency
Ding, L.
Baker, C.
Senellart, P.
Lemaitre, A.
Ducci, S.
Leo, G.
Favero, I.
[J]. APPLIED PHYSICS LETTERS, 2011, 98 (11)

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