共 87 条
[1]
Fast atomic force microscopy with self-transduced, self-sensing cantilever
[J].
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS,
2015, 14 (03)
[3]
[Anonymous], CLIN J TRADIT CHIN M
[5]
Bley T., 2012, 13 MECH FOR INT C LI, V2/3, P351
[8]
Chang S-w, 2010, APPL PHYS LETT, V96
[9]
Metal-assisted chemical etching of silicon in HF-H2O2
[J].
ELECTROCHIMICA ACTA,
2008, 53 (17)
:5509-5516