共 55 条
[3]
Homogeneity characterization of a large microwave plasma
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1997, 15 (03)
:668-672
[6]
Large microwave plasma reactor based on surface waves
[J].
JOURNAL DE PHYSIQUE IV,
1998, 8 (P7)
:187-194
[9]
Cottrell T.L., 1954, STRENGTHS CHEM BONDS, P310