Low-energy (300 eV) versatile scanning electron microscope with 30 nm resolution

We present a new low-energy (similar to 300 eV) scanning electron microscope with 30 nm resolution. The instrument operates with a flat integrated chip lens which performs electron extraction, e-beam focusing and deflection. The important point is that the electron emitter is positioned 1-2 mm away from the input aperture, thus, their precise alignment is not necessary. The extension of the instrument to a multicolumn array of electron beams for multipattern writing is quite feasible. (C) 1999 Elsevier Science B.V. All rights reserved.