Optical one-dimensional waveguides in oxyfluoride glass fabricated by Helium Ion implantation

被引：1
|
作者：
Xing, Shu-Dong [1 ,2 ]
Yin, Hao-Yang [1 ,2 ]
Wang, Tong [1 ,2 ]
Zhang, Liao-Lin [3 ]
Yue, Qing-Yang [4 ,5 ]
Fu, Li-Li [1 ,2 ]
Long, Xue-Wen [6 ]
Zheng, Rui-Lin [1 ,2 ]
Liu, Chun-Xiao [1 ,2 ,7 ]
机构：
[1] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, Nanjing 210023, Peoples R China
[2] Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing 210023, Peoples R China
[3] Jiangxi Univ Sci & Technol, Sch Mat Sci & Engn, Ganzhou 341000, Peoples R China
[4] Shandong Normal Univ, Shandong Prov Engn & Tech Ctr Light Manipulat, Sch Phys & Elect, Jinan 250014, Peoples R China
[5] Shandong Normal Univ, Shandong Prov Key Lab Opt & Photon Device, Sch Phys & Elect, Jinan 250014, Peoples R China
[6] Hunan Univ Med, Med Sch, Inst Med Phys, Huaihua 418000, Hunan, Peoples R China
[7] Jiangsu Prov Engn Res Ctr Fabricat & Applicat Spe, Nanjing 210023, Peoples R China
来源：
INTERNATIONAL JOURNAL OF MODERN PHYSICS B | 2022年 / 36卷 / 03期
基金：
中国国家自然科学基金;
关键词：
Oxyfluoride glass; optical waveguide; ion implantation; refractive index profile; PLANAR; CRYSTAL; IRRADIATION;
D O I：
10.1142/S0217979222500266
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this work, a one-dimensional waveguide is formed by virtue of the helium ion implantation in the oxyfluoride glass (OFG). The energy and the fluence of the ion implantation are 0.4 MeV and 6.0 x 10(14) He+.mm(-2), respectively. The m-line curve with the effective refractive indices of the modes was recorded by using the prism coupling system. The energy loss distribution and the refractive index profile were calculated by the stopping and range of ions into matter (SRIM)-2013 and the RCM, respectively. The light modal profile was measured by the end-facet coupling system. It suggests that the He+-ion implanted OFG waveguides have the potential to act as integrated photonic devices.
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收藏
页数：8
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