Volume photoinscription of glasses: three-dimensional micro- and nanostructuring with ultrashort laser pulses

被引:36
作者
Stoian, Razvan [1 ]
机构
[1] Univ Jean Monnet, Univ Lyon, Lab Hubert Curien, UMR 5516,CNRS, F-42000 St Etienne, France
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2020年 / 126卷 / 06期
关键词
Ultrashort laser pulses; Material processing; glass; Laser photoinscription; Refractive index engineering; 3D photonics; REFRACTIVE-INDEX CHANGES; WRITTEN WAVE-GUIDES; FUSED-SILICA; BRAGG GRATINGS; RELAXATION DYNAMICS; IMPACT IONIZATION; OPTICAL-BREAKDOWN; FABRICATION; LIGHT; INSCRIPTION;
D O I
10.1007/s00339-020-03516-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultrafast laser photoinscription of optical materials has seen a strong development in the recent years for a range of applications in integrated photonics. Fueled by its capability to confine energy in micro-domains of arbitrary geometries, it forecasts extensive potential in optical design. The process can locally modify the material structure and the electronic properties, changing in turn the refractive index. It thus lays down a powerful concept for three-dimensional modifications of materials, with the potential to design integrated optical functions. Using fused silica as model glass, this report discusses the physical mechanisms of photoinscription, outlining the possibility of refractive index engineering. We will review basic mechanisms of light propagation, excitation of matter, and energy relaxation concurring to material structural and photophysical modification. A dynamic perspective will be given, indicating relevant times for relaxing different forms of energy (electronic, thermal, etc.). The possibility to structure beyond diffraction limit will be explored, as well as the subsequent optical response of hybrid micro-nanostructures. Different irradiation geometries for photoinscription will be presented, pinpointing their potential to generate optical and photonic systems in three dimensions. Spatiotemporal pulse engineering can optimize the material response toward the achievement of accurate positive and negative index changes. An optimality concept can thus be defined for index design and present optimization concepts will be discussed. A particular potential derives from the utilization of non-diffractive beams with engineered dispersion. Finally, we indicate a range of application domains, from telecom to optofluidics and astrophotonics, outlining the potential of volume micro- and nanoprocessing.
引用
收藏
页数:30
相关论文
共 50 条
  • [41] Three-dimensional microscope vision system based on micro laser line scanning and adaptive genetic algorithms
    Apolinar, J.
    Rodriguez, Munoz
    OPTICS COMMUNICATIONS, 2017, 385 : 1 - 8
  • [42] Three-dimensional measurement of a tightly focused laser beam
    Xie, Xiangsheng
    Li, Li
    Wang, Sicong
    Wang, Zixin
    Zhou, Jianying
    AIP ADVANCES, 2013, 3 (02):
  • [43] Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses
    Tan, Yuanxin
    Lv, Haotian
    Xu, Jian
    Zhang, Aodong
    Song, Yunpeng
    Yu, Jianping
    Chen, Wei
    Wan, Yuexin
    Liu, Zhaoxiang
    Liu, Zhaohui
    Qi, Jia
    Cai, Yangjian
    Cheng, Ya
    OPTO-ELECTRONIC ADVANCES, 2023, 6 (10)
  • [44] Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses
    Schaefer, Mareike
    L'huillier, Johannes
    LASER-BASED MICRO- AND NANOPROCESSING XIV, 2020, 11268
  • [45] Preparation and characterization of polypyrrole films for three-dimensional micro supercapacitor
    Sun, Wei
    Chen, Xuyuan
    JOURNAL OF POWER SOURCES, 2009, 193 (02) : 924 - 929
  • [46] THREE-DIMENSIONAL MODIFICATION IN SILICON WITH INFRARED NANOSECOND LASER
    Yu, Xiaoming
    Trallero-Herrero, Carlos A.
    Grojo, David
    Lei, Shuting
    PROCEEDINGS OF THE ASME 11TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, 2016, VOL 1, 2016,
  • [47] Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing
    Burmeister, Frank
    Zeitner, Uwe D.
    Nolte, Stefan
    Tuennermann, Andreas
    ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS V, 2012, 8249
  • [48] Ultrafast Laser Fabrication of Hybrid Micro- and Nano-Structures in Semiconductor-doped Borosilicate Glasses
    Mardilovich, Pavel
    Fletcher, Luke B.
    Troy, Neil W.
    Yang, Lihmei
    Huang, Huan
    Risbud, Subhash H.
    Krol, Denise M.
    INTERNATIONAL JOURNAL OF APPLIED GLASS SCIENCE, 2013, 4 (02) : 87 - 99
  • [49] Three-dimensional hologram printing by single beam femtosecond laser direct writing
    Sohn, Ik-Bu
    Choi, Hun-Kook
    Yoo, Dongyoon
    Noh, Young-Chul
    Noh, Jiwhan
    Ahsan, Md. Shamim
    APPLIED SURFACE SCIENCE, 2018, 427 : 396 - 400
  • [50] Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining
    Ju, Yongfeng
    Liao, Yang
    Zhang, Long
    Sheng, Yinglong
    Zhang, Qiang
    Chen, Danping
    Cheng, Ya
    Xu, Zhizhan
    Sugioka, Koji
    Midorikawa, Katsumi
    MICROFLUIDICS AND NANOFLUIDICS, 2011, 11 (01) : 111 - 117