A terahertz ellipsometer

被引：9

作者：

Azarov, I. A. ^{[1
,3
]}

Shvets, V. A. ^{[1
,3
]}

Prokopiev, V. Yu. ^{[1
,3
]}

Dulin, S. A. ^{[1
]}

Rykhlitskii, S. V. ^{[1
]}

Choporova, Yu. Yu. ^{[2
,3
]}

Knyazev, B. A. ^{[2
,3
]}

Kruchinin, V. N. ^{[1
]}

Kruchinina, M. V. ^{[4
]}

机构：

[1] Russian Acad Sci, Siberian Branch, Rzhanov Inst Semicond Phys, Novosibirsk 630090, Russia

[2] Russian Acad Sci, Siberian Branch, Budker Inst Nucl Phys, Novosibirsk 630090, Russia

[3] Novosibirsk State Univ, Novosibirsk 630090, Russia

[4] Russian Acad Med Sci, Inst Therapy, Siberian Branch, Novosibirsk 630089, Russia

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2015年 / 58卷 / 03期

基金：

俄罗斯基础研究基金会;

关键词：

SI;

D O I：

10.1134/S0020441215030033

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A terahertz ellipsometer, based on the Novosibirsk free electron laser (FEL), is described. The device operates using the dynamic photometric "polarizer-sample-analyzer" scheme with a rotating analyzer. Sources of systematic errors, attributed to imperfections of optical elements, the accuracy of their alignment, and the influence of random errors, which are caused by measuring-section noises, were analyzed. The whole device and its separate units were tested. From results of measurements on tested samples, the operation accuracy of the ellipsometer was determined: delta I a (c) 1/2 0.3A degrees and delta(cos Delta) a (c) 1/2 0.01. The measurement data obtained at a wavelength of 147 mu m on the thickness and reflective index of blood films, which were deposited on a silicon substrate, are presented. In this case, the measurement accuracy of the reflective index is +/- 0.05 and thickness is 0.2 mu m.

引用

页码：381 / 388

页数：8

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