Fabrication and Characterization of an Ion Mobility Spectrometer Device for Volatile Organic Compounds Detection

被引:0
作者
Moreira, R. G. [1 ]
Moreira, L. H. Higa [1 ]
dos Santos Filho, S. G. [1 ]
机构
[1] Univ Sao Paulo, LSI PSI EPUSP, Av Prof Luciano Gualberto Trav 3,153, Sao Paulo, SP, Brazil
来源
2017 32ND SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO): CHIP ON THE SANDS | 2017年
关键词
IMS; Ion Mobility Spectrometer; VOC; Volatile Organic Compounds;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work proposes a new geometry for an Ion Mobility Spectrometer (IMS) in order to detect toluene, 2-propanol and water vapor. The IMS system was designed with a compact ionization chamber followed by another capable of selectively discriminate the range radius of the charged ions that collides to lateral sensing electrodes under a bidimensional distribution of high electric fields (0.0 to 27kV/cm) and under a stationary flow regime of ions, without turbulence, using a vacuum pump coupled to the chamber. The MATLAB platform was employed to solve the equations that describes the ion trajectories as a function of their mass and the Quickfield6.3 program was employed to simulate the bidimensional distribution of high electric fields under a stationary flow regime of ions without turbulence. The results showed a good fit of the range radius of the ionized species with the position of the lateral sensing electrodes after measuring the current intensity associated to the different ionic masses obtained from the ionization of toluene, 2-propanol and water, respectively.
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页数:4
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