Effect of the duty ratio on the indium tin oxide (ITO) film deposited by in-line pulsed DC magnetron sputtering method for resistive touch panel

被引：70
|
作者：
Ahn, Min Hyung [1 ]
Cho, Eou-Sik [1 ]
Kwon, Sang Jik [1 ]
机构：
[1] Kyungwon Univ, Dept Elect Engn, Songnam 461701, Kyunggi Do, South Korea
来源：
APPLIED SURFACE SCIENCE | 2011年 / 258卷 / 03期
关键词：
Reverse time; Frequency; Pulsed DC sputtering; Indium tin oxide (ITO); Duty ratio; RAY PHOTOELECTRON-SPECTROSCOPY; THIN-FILMS; PRESSURE;
D O I：
10.1016/j.apsusc.2011.09.081
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The indium tin oxide (ITO) film was deposited on PET (polyethylene terephthalate) film using in-line pulsed DC magnetron sputtering system with different duty ratios. The reverse time and the frequency of pulsed DC power were changed to obtain the different duty ratios. From the electrical and optical properties such as the sheet resistance, resistivity, thickness and transmittance, the pulsed DC sputtered ITO/PET films were also superior to the DC sputtered ITO/PET films. The reverse time had little effect on the properties of the ITO/PET film and the frequency of pulsed DC power had an immerse effect on the properties of the ITO/PET films. The optimal ITO/PET film was obtained when the frequency was 200 kHz, the reverse time was 1 mu s, and the duty ratio was about 80%. Crown Copyright (C) 2011 Published by Elsevier B.V. All rights reserved.
引用
收藏
页码：1242 / 1248
页数：7
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