Optimization of pH sensing using silicon nanowire field effect transistors with HfO2 as the sensing surface

Silicon nanowire field effect transistor sensors with SiO2/HfO2 as the gate dielectric sensing surface are fabricated using a top down approach. These sensors are optimized for pH sensing with two key characteristics. First, the pH sensitivity is shown to be independent of buffer concentration. Second, the observed pH sensitivity is enhanced and is equal to the Nernst maximum sensitivity limit of 59 mV/pH with a corresponding subthreshold drain current change of similar to 650%/pH. These two enhanced pH sensing characteristics are attributed to the use of HfO2 as the sensing surface and an optimized fabrication process compatible with silicon processing technology.