X-ray photoelectron spectroscopic study of surface modification of silk under UV-irradiation

被引:0
|
作者
Uchida, Y [1 ]
Fukuda, T [1 ]
Yanazawa, H [1 ]
机构
[1] Assoc Super Adv Elect Technol, Enviornm Proc Technol Lab, Totsuka Ku, Yokohama, Kanagawa 2440817, Japan
来源
THIN FILM MATERIALS, PROCESSES, AND RELIABILITY: PLASMA PROCESSING FOR THE 100 NM NODE AND COPPER INTERCONNECTS WITH LOW-K INTER-LEVEL DIELECTRIC FILMS | 2003年 / 2003卷 / 13期
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
X-ray photoelectron spectroscopy was used to investigate the surface modification of SiLK* resin (*Trademark of the Dow Chemical Company) to improve its adhesion to metal. Irradiation with UV light (lambda = 172 nm) was found to be an effective method of restructuring the bonds of the surface atoms of SiLK*. That is, it easily breaks carbon bonds and produces active atomic oxygen from even trace amounts of oxygen in the atmosphere. The unbonded carbon then combines with the atomic oxygen, and some of the carbon may desorb in the form of CO and CO2. When Ta is deposited on as-prepared SiLK*, it readily reacts with the carbon on the surface of the SiLK*. However, modification of the surface of the SiLK* by UV irradiation before deposition of the Ta inhibits the reaction between carbon and Ta, resulting in the formation of a more metal-like Ta layer.
引用
收藏
页码:231 / 236
页数:6
相关论文
共 50 条
  • [31] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF THE COMPOSITION AND STATE OF ALUMINUM FILMS ON THE SURFACE OF DIELECTRICS
    IVANOVA, TM
    POLYAKOVA, EI
    INORGANIC MATERIALS, 1988, 24 (03) : 323 - 325
  • [32] X-ray photoelectron spectroscopic study of KrF excimer laser nitrided InP surface
    Akane, T
    Sugioka, K
    Midorikawa, K
    Dubowski, JJ
    Aoki, N
    Toyoda, K
    JOURNAL OF APPLIED PHYSICS, 2001, 90 (12) : 5851 - 5855
  • [33] AN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF OXIDATION OF AMMONIA ON POTASSIUM COVERED PLATINUM SURFACE
    AYYOOB, M
    HEGDE, MS
    INDIAN JOURNAL OF CHEMISTRY SECTION A-INORGANIC BIO-INORGANIC PHYSICAL THEORETICAL & ANALYTICAL CHEMISTRY, 1983, 22 (06): : 465 - 468
  • [34] Surface modification of silicon and silica in biological environment: an X-ray photoelectron spectroscopy study
    Seal, S
    Barr, TL
    Krezoski, S
    Petering, D
    APPLIED SURFACE SCIENCE, 2001, 173 (3-4) : 339 - 351
  • [35] Electronic structure of thiaporphyrins: An X-ray photoelectron spectroscopic study
    Gopinath, CS
    Pandian, RP
    Manoharan, PT
    JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1996, (07): : 1255 - 1259
  • [36] X-ray photoelectron spectroscopic study of composite glass fillers
    Simon, V.
    Colceriu, A.
    Prejmerean, C.
    Moldovan, M.
    Prinz, M.
    Neumann, M.
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2007, 9 (11): : 3350 - 3353
  • [37] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF SOME ISOELECTRONIC COMPOUNDS
    JOLLY, WL
    AVANZINO, SC
    LAZARUS, MS
    PERRY, WB
    RIETZ, RR
    SCHAAF, TF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1975, (169): : 18 - 18
  • [38] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF LATTICE INSTABILITY IN AGI
    NEMOSHKALENKO, VV
    ALESHIN, VG
    SENKEVICH, AI
    SHASHKINA, TB
    JOURNAL OF STRUCTURAL CHEMISTRY, 1977, 18 (05) : 771 - 772
  • [39] AN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF URANIUM-COMPOUNDS
    BEACH, DB
    BOMBEN, KD
    EDELSTEIN, NM
    EISENBERG, DC
    JOLLY, WL
    SHINOMOTO, R
    STREITWIESER, A
    INORGANIC CHEMISTRY, 1986, 25 (11) : 1735 - 1737
  • [40] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF LEAD FLUOROBORATE GLASSES
    WANG, Y
    OSAKA, A
    MIURA, Y
    TSUGARU, T
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1989, 8 (04) : 421 - 423