X-ray photoelectron spectroscopic study of surface modification of silk under UV-irradiation

被引:0
|
作者
Uchida, Y [1 ]
Fukuda, T [1 ]
Yanazawa, H [1 ]
机构
[1] Assoc Super Adv Elect Technol, Enviornm Proc Technol Lab, Totsuka Ku, Yokohama, Kanagawa 2440817, Japan
来源
THIN FILM MATERIALS, PROCESSES, AND RELIABILITY: PLASMA PROCESSING FOR THE 100 NM NODE AND COPPER INTERCONNECTS WITH LOW-K INTER-LEVEL DIELECTRIC FILMS | 2003年 / 2003卷 / 13期
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
X-ray photoelectron spectroscopy was used to investigate the surface modification of SiLK* resin (*Trademark of the Dow Chemical Company) to improve its adhesion to metal. Irradiation with UV light (lambda = 172 nm) was found to be an effective method of restructuring the bonds of the surface atoms of SiLK*. That is, it easily breaks carbon bonds and produces active atomic oxygen from even trace amounts of oxygen in the atmosphere. The unbonded carbon then combines with the atomic oxygen, and some of the carbon may desorb in the form of CO and CO2. When Ta is deposited on as-prepared SiLK*, it readily reacts with the carbon on the surface of the SiLK*. However, modification of the surface of the SiLK* by UV irradiation before deposition of the Ta inhibits the reaction between carbon and Ta, resulting in the formation of a more metal-like Ta layer.
引用
收藏
页码:231 / 236
页数:6
相关论文
共 50 条
  • [21] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF COPPER MINERALS
    NAKAI, I
    SUGITANI, Y
    NAGASHIMA, K
    NIWA, Y
    JOURNAL OF INORGANIC & NUCLEAR CHEMISTRY, 1978, 40 (05): : 789 - 791
  • [22] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF FEHNAY ZEOLITES
    MIKUSIK, P
    JUSKA, T
    NOVAKOVA, J
    KUBELKOVA, L
    WICHTERLOVA, B
    JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1981, 77 : 1179 - 1182
  • [23] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF OXIDATION OF INP
    SHIBATA, N
    IKOMA, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12A): : 3976 - 3980
  • [24] AN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF THE OXIDATION OF CHALCOPYRITE
    BUCKLEY, AN
    WOODS, R
    AUSTRALIAN JOURNAL OF CHEMISTRY, 1984, 37 (12) : 2403 - 2413
  • [25] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF WOOD LIGNINS
    VARMA, AJ
    CARBOHYDRATE POLYMERS, 1984, 4 (04) : 315 - 318
  • [26] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF PHOTODECOMPOSITION IN AZIDES
    WIEGAND, D
    DIBONA, P
    SHARMA, J
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (03): : 377 - 377
  • [27] X-Ray Photoelectron Study of the Oxidative Modification of Proteins
    Shabanova, I. N.
    Terebova, N. S.
    Kozhevnikova, O. V.
    Barsukov, A. K.
    JOURNAL OF SURFACE INVESTIGATION, 2013, 7 (05): : 985 - 989
  • [28] Effect of X-rays on the surface composition of polyphosphazene: X-ray photoelectron spectroscopic study
    A. V. Naumkin
    I. O. Volkov
    D. R. Tur
    Polymer Science Series A, 2009, 51 : 537 - 541
  • [29] Effect of X-rays on the surface composition of polyphosphazene: X-ray photoelectron spectroscopic study
    Naumkin, A. V.
    Volkov, I. O.
    Tur, D. R.
    POLYMER SCIENCE SERIES A, 2009, 51 (05) : 537 - 541
  • [30] THERMOLUMINESCENCE OF POLYURETHANES AFTER X-RAY-IRRADIATION AND UV-IRRADIATION
    KOROBEINIKOVA, VN
    KAZAKOV, VP
    ALEEV, RS
    CHUVILIN, YN
    VYSOKOMOLEKULYARNYE SOEDINENIYA SERIYA A, 1974, 16 (12): : 2717 - 2724