TSEM: A Review of Scanning Electron Microscopy in Transmission Mode and Its Applications

被引：59

作者：

Klein, Tobias ^{[1
]}

Buhr, Egbert ^{[1
]}

Frase, Carl Georg ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 171 | 2012年 / 171卷

关键词：

MONTE-CARLO-SIMULATION; IN-SITU VISUALIZATION; X-RAY-LITHOGRAPHY; HIGH-RESOLUTION; LOW-ENERGY; ROUTINE EXAMINATION; TUNGSTEN EMITTER; STEM DETECTOR; WET-STEM; SEM;

D O I：

10.1016/B978-0-12-394297-5.00006-4

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：297 / 356

页数：60

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