共 29 条
[3]
Automotive catalysis studied by surface science
[J].
CHEMICAL SOCIETY REVIEWS,
2008, 37 (10)
:2204-2211
[9]
Aqueous-based photoresist drying using supercritical carbon dioxide to prevent pattern collapse
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:3313-3317
[10]
Hirano K, 2014, ULTRAMICROSCOPY, V143, P52, DOI [10.1016/J.ultramic.2013.10.010, 10.1016/j.ultramic.2013.10.010]