Hard-x-ray microscopy with Fresnel zone plates reaches 40 nm Rayleigh resolution

被引：205

作者：

Chu, Y. S. ^{[1
]}

Yi, J. M. ^{[1
]}

De Carlo, F. ^{[1
]}

Shen, Q. ^{[1
]}

Lee, Wah-Keat ^{[1
]}

Wu, H. J. ^{[2
]}

Wang, C. L. ^{[2
]}

Wang, J. Y. ^{[2
]}

Liu, C. J. ^{[2
]}

Wang, C. H. ^{[2
]}

Wu, S. R. ^{[2
,3
]}

Chien, C. C. ^{[2
,3
]}

Hwu, Y. ^{[2
,3
,4
,5
]}

Tkachuk, A. ^{[6
]}

Yun, W. ^{[6
]}

Feser, M. ^{[6
]}

Liang, K. S. ^{[5
]}

Yang, C. S. ^{[7
]}

Je, J. H. ^{[8
]}

Margaritondo, G. ^{[9
]}

机构：

[1] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA

[2] Acad Sinica, Inst Phys, Taipei 115, Taiwan

[3] Natl Tsing Hua Univ, Dept Engn Sci & Syst, Hsinchu 300, Taiwan

[4] Natl Taiwan Ocean Univ, Inst Optoelect Sci, Chilung 202, Taiwan

[5] Natl Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan

[6] Xradia Inc, Concord, CA 94520 USA

[7] Natl Hlth Res Inst, Ctr Nanomed, Miaoli 350, Taiwan

[8] Pohang Univ Sci & Technol, Xray Imaging Ctr, Pohang 790784, South Korea

[9] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 10期

关键词：

D O I：

10.1063/1.2857476

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Substantial improvements in the nanofabrication and characteristics of gold Fresnel zone plates yielded unprecedented resolution levels in hard-x-ray microscopy. Tests performed on a variety of specimens with 8-10 keV photons demonstrated a first-order lateral resolution below 40 nm based on the Rayleigh criterion. Combined with the use of a phase contrast technique, this makes it possible to view features in the 30 nm range; good-quality images can be obtained at video rate, down to 50 ms/frame. The important repercussions on materials science, nanotechnology, and the life sciences are discussed. (C) 2008 American Institute of Physics.

引用

页数：3

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