The study of new vacuum pressure measurement technique using ultrasonic acoustic impedance transducers

被引：0

作者：

Hong, S. S. ^{[1
]}

Khan, Wakil ^{[1
,2
]}

Shin, Y. H. ^{[1
]}

Cho, S. H. ^{[1
]}

Ahn, B. Y. ^{[1
]}

Chung, J. W. ^{[1
]}

Woo, S. Y. ^{[1
]}

机构：

[1] Korea Res Inst Stand & Sci KRISS, Taejon 305340, South Korea

[2] Univ Sci & Technol UST, Taejon 305333, South Korea

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2011年 / 82卷 / 07期

关键词：

acoustic impedance; ultrasonic transducers; ultrasonic transmission; vacuum gauges; vacuum measurement; LAYERS;

D O I：

10.1063/1.3615310

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Ultrasonic sensors of 500 kHz frequency have been used to study the measuring of gas pressure in the range 1.33 x 10(3)-2.026 x 10(5) Pa. From the experimental data it was observed that amplitude of the transmitted ultrasound was dependent on gas pressure. The results confirm that by using appropriate instruments including sensors and electronic devices, pressure of the gas can be successfully measured by measuring the magnitude of the received signal. The proposed method is expected to be applied to develop as new vacuum pressure measurement instrument. (C) 2011 American Institute of Physics. [doi:10.1063/1.3615310]

引用

页数：4

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